Abstract
The self-assembled NiSi quantum dot arrays were grown on relaxed epitaxial Si0.7Ge0.3 on (001)Si. The two dimensional pseudohexagonal structure was achieved under the influence of repulsive stress between nanodots. The undulated templates helped in achieving the growth of ordered silicide quantum dots with selected periodicity and size.
Original language | English (US) |
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Pages (from-to) | 1836-1838 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 9 |
DOIs | |
State | Published - Sep 1 2003 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)