Selective multiple analyte detection using multi-mode excitation of a MEMS resonator

Material Science

• Resonator 100%
• Microelectromechanical System 100%
• Helium 66%
• Thermal Conductivity 66%
• Graphene Oxide 66%
• Surface 66%
• Devices 66%
• Sensor 66%
• Electronic Device 33%
• Smart Sensor 33%
• Mechanical Property 33%
• Water Vapor 33%
• Finite Element Modeling 33%
• Arch 33%

INIS

• resonators 100%
• detection 100%
• excitation 100%
• sensors 50%
• beams 50%
• oxides 33%
• surfaces 33%
• devices 33%
• graphene 33%
• humidity 33%
• thermal conductivity 33%
• helium 33%
• finite element method 16%
• solutions 16%
• cooling 16%
• water vapor 16%
• electronic equipment 16%
• shape 16%
• affinity 16%
• absorption 16%
• experimental data 16%

Engineering

• Multimode 100%
• Detection 100%
• Thermal Conductivity 33%
• Surfaces 33%
• Relative Humidity 16%
• Portable Electronics 16%
• Building Block 16%
• Good Agreement 16%
• Smart Sensors 16%
• Physisorption 16%
• Mode Shape 16%
• Mode of Vibration 16%
• Development 16%
• Mechanisms 16%
• Water 16%
• Characteristics 16%
• Illustrates 16%
• Electronic Devices 16%
• Arches 16%
• Plane Mode 16%