Scatterometry of diffraction gratings: Time-and-frequency domains technique

Kostyantyn Sirenko; Gérard Granet; Petr Melezhik; Nataliya Yashina

Scatterometry of diffraction gratings: Time-and-frequency domains technique

Kostyantyn Sirenko, Gérard Granet, Petr Melezhik, Nataliya Yashina

Computer, Electrical and Mathematical Sciences and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The paper discusses capabilities of a novel theoretical and numerical-modeling based approach to scatterometry problems. This approach allows reliable detection of deviations in gratings' critical dimensions during manufacturing process. The core of the approach is simultaneous analysis in time and frequency domains and one-to-one correspondence between electromagnetics characteristics and geometrical/material properties of gratings.

Original language	English (US)
Title of host publication	2013 International Symposium on Electromagnetic Theory
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
State	Published - 2013

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

Cite this

@inproceedings{36e8e0d64991416caf3913f0f13c01aa,

title = "Scatterometry of diffraction gratings: Time-and-frequency domains technique",

abstract = "The paper discusses capabilities of a novel theoretical and numerical-modeling based approach to scatterometry problems. This approach allows reliable detection of deviations in gratings' critical dimensions during manufacturing process. The core of the approach is simultaneous analysis in time and frequency domains and one-to-one correspondence between electromagnetics characteristics and geometrical/material properties of gratings.",

author = "Kostyantyn Sirenko and G{\'e}rard Granet and Petr Melezhik and Nataliya Yashina",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2013",

language = "English (US)",

booktitle = "2013 International Symposium on Electromagnetic Theory",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

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TY - GEN

T1 - Scatterometry of diffraction gratings: Time-and-frequency domains technique

AU - Sirenko, Kostyantyn

AU - Granet, Gérard

AU - Melezhik, Petr

AU - Yashina, Nataliya

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2013

Y1 - 2013

N2 - The paper discusses capabilities of a novel theoretical and numerical-modeling based approach to scatterometry problems. This approach allows reliable detection of deviations in gratings' critical dimensions during manufacturing process. The core of the approach is simultaneous analysis in time and frequency domains and one-to-one correspondence between electromagnetics characteristics and geometrical/material properties of gratings.

AB - The paper discusses capabilities of a novel theoretical and numerical-modeling based approach to scatterometry problems. This approach allows reliable detection of deviations in gratings' critical dimensions during manufacturing process. The core of the approach is simultaneous analysis in time and frequency domains and one-to-one correspondence between electromagnetics characteristics and geometrical/material properties of gratings.

UR - http://hdl.handle.net/10754/656110

UR - https://ieeexplore.ieee.org/document/6565901/

M3 - Conference contribution

BT - 2013 International Symposium on Electromagnetic Theory

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

Scatterometry of diffraction gratings: Time-and-frequency domains technique

Abstract

Bibliographical note

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