Scatterometry of diffraction gratings: Time-and-frequency domains technique

Kostyantyn Sirenko, Gérard Granet, Petr Melezhik, Nataliya Yashina

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The paper discusses capabilities of a novel theoretical and numerical-modeling based approach to scatterometry problems. This approach allows reliable detection of deviations in gratings' critical dimensions during manufacturing process. The core of the approach is simultaneous analysis in time and frequency domains and one-to-one correspondence between electromagnetics characteristics and geometrical/material properties of gratings.
Original languageEnglish (US)
Title of host publication2013 International Symposium on Electromagnetic Theory
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
StatePublished - 2013

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01


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