Scanning probe oxidation of SiC, fabrication possibilities and kinetics considerations

Engineering

• Fabrication 50%
• Oxide Layer 50%
• Chemical Composition 50%
• Activation Energy 50%
• Applied Voltage 50%
• Aspect Ratio 50%
• Oxide Thickness 50%
• Pulse Duration 50%
• Diffusion 50%
• Density 50%
• Experiments 50%
• Kinetic 50%
• Single Dot 50%

Chemistry

• Oxide 100%
• Probe 100%
• Oxidation Reaction 50%
• Anodizing 50%
• Diffusion 50%
• Atomic Force Microscopy 50%
• Reaction Activation Energy 50%
• Density 50%
• Chemical Kinetics Characteristics 50%
• Drop 50%

Material Science

• Air 50%