Scalable pressure sensor based on electrothermally operated resonator

Amal Z. Hajjaj; Md Abdullah Al Hafiz; Nouha Alcheikh; Mohammad I. Younis

doi:10.1115/DETC2017-67785

Scalable pressure sensor based on electrothermally operated resonator

Amal Z. Hajjaj, Md Abdullah Al Hafiz, Nouha Alcheikh, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.

Original language	English (US)
Title of host publication	22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Electronic)	9780791858165
DOIs	https://doi.org/10.1115/DETC2017-67785
State	Published - 2017
Event	ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 - Cleveland, United States Duration: Aug 6 2017 → Aug 9 2017

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	4

Conference

Conference	ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
Country/Territory	United States
City	Cleveland
Period	08/6/17 → 08/9/17

Bibliographical note

Publisher Copyright:
© Copyright 2017 ASME.

Keywords

Cooling effect
Electrothermal actuation
Pressure sensor
Resonator

ASJC Scopus subject areas

Mechanical Engineering
Computer Graphics and Computer-Aided Design
Computer Science Applications
Modeling and Simulation

Access to Document

10.1115/DETC2017-67785

Cite this

Hajjaj, A. Z., Al Hafiz, M. A., Alcheikh, N., & Younis, M. I. (2017). Scalable pressure sensor based on electrothermally operated resonator. In 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2017-67785

Hajjaj, Amal Z. ; Al Hafiz, Md Abdullah ; Alcheikh, Nouha et al. / Scalable pressure sensor based on electrothermally operated resonator. 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2017. (Proceedings of the ASME Design Engineering Technical Conference).

@inproceedings{33b39f420cd94d1fb42f098b8319445c,

title = "Scalable pressure sensor based on electrothermally operated resonator",

abstract = "We experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.",

keywords = "Cooling effect, Electrothermal actuation, Pressure sensor, Resonator",

author = "Hajjaj, {Amal Z.} and {Al Hafiz}, {Md Abdullah} and Nouha Alcheikh and Younis, {Mohammad I.}",

note = "Publisher Copyright: {\textcopyright} Copyright 2017 ASME.; ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 ; Conference date: 06-08-2017 Through 09-08-2017",

year = "2017",

doi = "10.1115/DETC2017-67785",

language = "English (US)",

series = "Proceedings of the ASME Design Engineering Technical Conference",

publisher = "American Society of Mechanical Engineers (ASME)",

booktitle = "22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems",

}

Hajjaj, AZ, Al Hafiz, MA, Alcheikh, N & Younis, MI 2017, Scalable pressure sensor based on electrothermally operated resonator. in 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Proceedings of the ASME Design Engineering Technical Conference, vol. 4, American Society of Mechanical Engineers (ASME), ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017, Cleveland, United States, 08/6/17. https://doi.org/10.1115/DETC2017-67785

Scalable pressure sensor based on electrothermally operated resonator. / Hajjaj, Amal Z.; Al Hafiz, Md Abdullah; Alcheikh, Nouha et al.
22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2017. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Scalable pressure sensor based on electrothermally operated resonator

AU - Hajjaj, Amal Z.

AU - Al Hafiz, Md Abdullah

AU - Alcheikh, Nouha

AU - Younis, Mohammad I.

PY - 2017

Y1 - 2017

N2 - We experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.

AB - We experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.

KW - Cooling effect

KW - Electrothermal actuation

KW - Pressure sensor

KW - Resonator

UR - http://www.scopus.com/inward/record.url?scp=85034747893&partnerID=8YFLogxK

U2 - 10.1115/DETC2017-67785

DO - 10.1115/DETC2017-67785

M3 - Conference contribution

AN - SCOPUS:85034747893

T3 - Proceedings of the ASME Design Engineering Technical Conference

BT - 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems

PB - American Society of Mechanical Engineers (ASME)

T2 - ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017

Y2 - 6 August 2017 through 9 August 2017

ER -

Hajjaj AZ, Al Hafiz MA, Alcheikh N, Younis MI. Scalable pressure sensor based on electrothermally operated resonator. In 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME). 2017. (Proceedings of the ASME Design Engineering Technical Conference). doi: 10.1115/DETC2017-67785

Scalable pressure sensor based on electrothermally operated resonator

Abstract

Publication series

Conference

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this