Scalable pressure sensor based on electrothermally operated resonator

Amal Z. Hajjaj, Md Abdullah Al Hafiz, Nouha Alcheikh, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.

Original languageEnglish (US)
Title of host publication22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791858165
DOIs
StatePublished - 2017
EventASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 - Cleveland, United States
Duration: Aug 6 2017Aug 9 2017

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Conference

ConferenceASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
Country/TerritoryUnited States
CityCleveland
Period08/6/1708/9/17

Bibliographical note

Publisher Copyright:
© Copyright 2017 ASME.

Keywords

  • Cooling effect
  • Electrothermal actuation
  • Pressure sensor
  • Resonator

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design
  • Modeling and Simulation

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