RF MEMS electrostatically actuated tunable capacitors and their applications: a review

Fahimullah Khan, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

17 Scopus citations


This paper reviews the recent developments of micro-electromechanical system (MEMS) based electrostatically actuated tunable capacitors. MEMS based tunable capacitors (MBTCs) are important building blocks in advanced radio frequency communication systems and portable electronics. This is due to their excellent performance compared to solid state counterpart. Different designs, tuning mechanisms, and performance parameters of MBTCs are discussed, compared, and summarized. Several quantitative comparisons in terms of tuning range, quality factor ($\textit{Q}$ factor), and electrodes configurations are presented, which provide deep insight into different design studies, assists in selecting designs, and layouts that best suit various applications. We also highlight recent modern applications of tunable capacitors, such as mobile handsets, internet of things, communication sensors, and 5G antennas. Finally, the paper discusses different design approaches and proposes guidelines for performance improvement.
Original languageEnglish (US)
Pages (from-to)013002
JournalJournal of Micromechanics and Microengineering
Issue number1
StatePublished - Dec 8 2021

Bibliographical note

KAUST Repository Item: Exported on 2021-12-15
Acknowledgements: This publication is based upon work supported by King Abdullah University of Science and Technology (KAUST)

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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