Resonator-based M/NEMS logic devices: Review of recent advances

Saad Ilyas, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

30 Scopus citations


As transistors are reaching their fundamental limits in terms of power consumption, miniaturization, and heat generation, there is an imminent need to develop alternate computing technologies. One such an alternative is through micro/nanoelectromechanical systems (M/NEMS) that focuses on ultra-low energy consumption. Computing based on static MEMS switches has been proposed, however these suffer from reliability issues due to contact and stiction. Recently, logic devices based on electro mechanically excited vibrating structures, resonators, have emerged as a potential solution that overcomes these issues. This paper reviews the recent advancements of resonator-based M/NEMS logic devices. First, pioneering works in the field are surveyed. Then, logic devices based on frequency tuning are discussed. Next, cascadability of such logic devices is demonstrated. Finally, a discussion about the challenges of such technology and future prospects is presented.
Original languageEnglish (US)
Pages (from-to)111821
JournalSensors and Actuators, A: Physical
StatePublished - Dec 28 2019

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was supported by the King Abdullah University of Science and Technology (KAUST) research funds.


Dive into the research topics of 'Resonator-based M/NEMS logic devices: Review of recent advances'. Together they form a unique fingerprint.

Cite this