Resist materials

Scott A. MacDonald; Jean M.J. Frechet; Hiroshi Ito; C. Grant Willson

doi:10.1016/0167-9317(85)90037-1

Resist materials

Scott A. MacDonald^*, Jean M.J. Frechet, Hiroshi Ito, C. Grant Willson

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Original language	English (US)
Pages (from-to)	277-278
Number of pages	2
Journal	Microelectronic Engineering
Volume	3
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(85)90037-1
State	Published - Dec 1985
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/0167-9317(85)90037-1

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@article{d2a0564392cf4aa0bc3fe5630da340c2,

title = "Resist materials",

author = "MacDonald, {Scott A.} and Frechet, {Jean M.J.} and Hiroshi Ito and {Grant Willson}, C.",

year = "1985",

month = dec,

doi = "10.1016/0167-9317(85)90037-1",

language = "English (US)",

volume = "3",

pages = "277--278",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "1-4",

}

TY - JOUR

T1 - Resist materials

AU - MacDonald, Scott A.

AU - Frechet, Jean M.J.

AU - Ito, Hiroshi

AU - Grant Willson, C.

PY - 1985/12

Y1 - 1985/12

UR - http://www.scopus.com/inward/record.url?scp=0022201082&partnerID=8YFLogxK

U2 - 10.1016/0167-9317(85)90037-1

DO - 10.1016/0167-9317(85)90037-1

M3 - Article

AN - SCOPUS:0022201082

SN - 0167-9317

VL - 3

SP - 277

EP - 278

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4

ER -

Resist materials

ASJC Scopus subject areas

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