RESINES POUR UV LOINTAIN METTANT EN OEUVRE UN MECANISME D'AMPLIFICATION CHIMIQUE.

Translated title of the contribution: Senstive Deep UV Resist Incorporation Chemical Amplification.

J. M J Frechet^*, Hiroshi Ito, C. Grant Willson

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

84 Scopus citations

Translated title of the contribution	Senstive Deep UV Resist Incorporation Chemical Amplification.
Original language	French
Title of host publication	Unknown Host Publication Title
Publisher	Comite du Colloque Int sur la Microlithographie
Pages	260
Number of pages	1
State	Published - 1982
Externally published	Yes

ASJC Scopus subject areas

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title = "RESINES POUR UV LOINTAIN METTANT EN OEUVRE UN MECANISME D'AMPLIFICATION CHIMIQUE.",

author = "Frechet, {J. M J} and Hiroshi Ito and Willson, {C. Grant}",

year = "1982",

language = "French",

pages = "260",

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publisher = "Comite du Colloque Int sur la Microlithographie",

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AU - Ito, Hiroshi

AU - Willson, C. Grant

PY - 1982

Y1 - 1982

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M3 - Conference contribution

AN - SCOPUS:0020279137

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BT - Unknown Host Publication Title

PB - Comite du Colloque Int sur la Microlithographie

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