Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO2 films via pulsed liquid-injection MOCVD

M. Eleter*, S. Daniele, V. Brizé, C. Dubourdieu, C. Lachaud, N. Blasco, A. Pinchart

*Corresponding author for this work

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Chemistry