Reduced-order modeling of MEMS

Ali H. Nayfeh; Mohammad I. Younis; Eihab M. Abdel-Rahman

Reduced-order modeling of MEMS

Ali H. Nayfeh^*, Mohammad I. Younis, Eihab M. Abdel-Rahman

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

We develop reduced-order models for microelectromechanical systems (MEMS) devices using the Galerkin procedure employing the mode shapes of their structural elements. The result is a finite set of nonlinear coupled ordinary-differential equations. These equations, in turn, are used to calculate the equilibrium configurations as well as the dynamics of the devices. We apply this methodology to MEMS made of microbeams and rectangular and circular microplates. We validate these models with available experimental results and numerical solutions of the full governing partial-differential equations and associated boundary conditions.

Original language	English (US)
Title of host publication	3rd M.I.T. Conference on Computational Fluid and Solid Mechanics
Pages	394-400
Number of pages	7
State	Published - 2005
Externally published	Yes
Event	3rd M.I.T. Conference on Computational Fluid and Solid Mechanics - Boston, MA, United States Duration: Jun 14 2005 → Jun 17 2005

Publication series

Name	3rd M.I.T. Conference on Computational Fluid and Solid Mechanics

Other

Other	3rd M.I.T. Conference on Computational Fluid and Solid Mechanics
Country/Territory	United States
City	Boston, MA
Period	06/14/05 → 06/17/05

Keywords

MEMS
Microbeams
Microplates
Reduced-order models

ASJC Scopus subject areas

Fluid Flow and Transfer Processes
Computational Mathematics

Cite this

@inproceedings{d080445481f94d03bbec037ec2321956,

title = "Reduced-order modeling of MEMS",

abstract = "We develop reduced-order models for microelectromechanical systems (MEMS) devices using the Galerkin procedure employing the mode shapes of their structural elements. The result is a finite set of nonlinear coupled ordinary-differential equations. These equations, in turn, are used to calculate the equilibrium configurations as well as the dynamics of the devices. We apply this methodology to MEMS made of microbeams and rectangular and circular microplates. We validate these models with available experimental results and numerical solutions of the full governing partial-differential equations and associated boundary conditions.",

keywords = "MEMS, Microbeams, Microplates, Reduced-order models",

author = "Nayfeh, {Ali H.} and Younis, {Mohammad I.} and Abdel-Rahman, {Eihab M.}",

year = "2005",

language = "English (US)",

isbn = "0080444814",

series = "3rd M.I.T. Conference on Computational Fluid and Solid Mechanics",

pages = "394--400",

booktitle = "3rd M.I.T. Conference on Computational Fluid and Solid Mechanics",

note = "3rd M.I.T. Conference on Computational Fluid and Solid Mechanics ; Conference date: 14-06-2005 Through 17-06-2005",

}

TY - GEN

T1 - Reduced-order modeling of MEMS

AU - Nayfeh, Ali H.

AU - Younis, Mohammad I.

AU - Abdel-Rahman, Eihab M.

PY - 2005

Y1 - 2005

N2 - We develop reduced-order models for microelectromechanical systems (MEMS) devices using the Galerkin procedure employing the mode shapes of their structural elements. The result is a finite set of nonlinear coupled ordinary-differential equations. These equations, in turn, are used to calculate the equilibrium configurations as well as the dynamics of the devices. We apply this methodology to MEMS made of microbeams and rectangular and circular microplates. We validate these models with available experimental results and numerical solutions of the full governing partial-differential equations and associated boundary conditions.

AB - We develop reduced-order models for microelectromechanical systems (MEMS) devices using the Galerkin procedure employing the mode shapes of their structural elements. The result is a finite set of nonlinear coupled ordinary-differential equations. These equations, in turn, are used to calculate the equilibrium configurations as well as the dynamics of the devices. We apply this methodology to MEMS made of microbeams and rectangular and circular microplates. We validate these models with available experimental results and numerical solutions of the full governing partial-differential equations and associated boundary conditions.

KW - MEMS

KW - Microbeams

KW - Microplates

KW - Reduced-order models

UR - http://www.scopus.com/inward/record.url?scp=80053436680&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:80053436680

SN - 0080444814

SN - 9780080444819

T3 - 3rd M.I.T. Conference on Computational Fluid and Solid Mechanics

SP - 394

EP - 400

BT - 3rd M.I.T. Conference on Computational Fluid and Solid Mechanics

T2 - 3rd M.I.T. Conference on Computational Fluid and Solid Mechanics

Y2 - 14 June 2005 through 17 June 2005

ER -

Reduced-order modeling of MEMS

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

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