Reciprocal space mapping of GaNxAs1-x grown by RF plasma-assisted solid source molecular beam epitaxy

W. K. Loke, S. F. Yoon*, T. K. Ng, S. Z. Wang, W. J. Fan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


We present the change in diffused scattering intensity and crystal truncation rod in X-ray reciprocal space mapping (RSM) of GaNxAs1-x grown by a radio frequency (RF) nitrogen plasma source in a solid source molecular beam epitaxy system. The RSM results are discussed in relation to variation in the low-temperature photoluminescence (PL) efficiency and peak energy. The X-ray RSM plots were recorded using a high-resolution triple-axis X-ray diffractometer on GaNAs samples annealed from 550 to 800°C. The RSM plots show higher diffused scattering around the GaNAs and GaAs (0 0 4) reflection point for the as-grown GaNxAs1-x sample with x = 1.3%, indicating a high incorporation rate of N atoms and N complexes as interstitials, compared to a 5μm-thick unintentionally doped GaAs sample. A reduction in diffused scattering around the GaNxAs1-x and GaAs (0 0 4) Bragg reflection point was observed with sharp termination of the crystal surface in the sample annealed at ∼ 700°C for 10 min. This is in good agreement with the observed improved PL efficiency, due to annihilation of interstitial point defects.

Original languageEnglish (US)
Pages (from-to)427-431
Number of pages5
JournalJournal of Crystal Growth
Issue number3-4
StatePublished - Sep 2002
Externally publishedYes


  • A1. Photoluminescence
  • A1. Scattering
  • A3. Molecular beam epitaxy

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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