Following design optimization, a rod-type photonic crystal structure is realized using dip-pen nano-lithography. Dots are written by 16-MHA on metal-coated silicon substrate. After dry-etching, SEM images confirm the rod-diameter of ∼250nm and lattice-constant of ∼470nm.
|Original language||English (US)|
|Title of host publication||Proceedings 12th International Conference on Fiber Optics and Photonics, Photonics 2014|
|Publisher||Optical Society of America (OSA)firstname.lastname@example.org|
|State||Published - Jan 1 2014|