Real-time in situ growth study of TiN- and TiC _xN _y-based superhard nanocomposite coatings using spectroscopic ellipsometry

Keyphrases

• Between-person 50%
• Electrical Behavior 50%
• Electron Scattering 50%
• Film Growth 50%
• Film Resistivity 50%
• Grain Size 50%
• Growth Studies 100%
• In Situ 50%
• In Situ Growth 100%
• Individual Grains 50%
• Individual Nanoparticles 50%
• Mean Free Path 50%
• Microstructure Model 50%
• Multi-connectivity 50%
• Nanocomposite Coating 100%
• Nanocomposite Film 50%
• Non-contact 50%
• Non-destructive 50%
• Optical Behavior 50%
• Optical Constants 50%
• Particle Size 100%
• Quaternary Nanocomposite 50%
• Scattering Time 50%
• SiCN Films 50%
• Silicon Nitride 50%
• Spectroscopic Ellipsometry 100%
• Superhard 50%
• Superhard Nanocomposites 100%
• Ternary Nanocomposite 50%

Material Science

• Electrical Resistivity 50%
• Film 100%
• Film Growth 50%
• Nanocomposite Coating 100%
• Nanocomposite Film 50%
• Nanocomposites 50%
• Nanoparticle 50%
• Ternary Nanocomposite 50%