Real-time in situ growth study of TiN- and TiC _xN _y-based superhard nanocomposite coatings using spectroscopic ellipsometry

We investigate in situ and in real-time the growth of superhard ternary nanocomposite (nc)-TiNamorphous (a) - Si3 N4 and quaternary nc-Ti Cx Ny a-SiCN films. Using nondestructive, noncontact spectroscopic ellipsometry and appropriate ellipsometric models, we determine the variation of optical constants, film resistivity, and electron scattering time and mean free path as a function of thickness and particle size. Based on the optical and electrical behavior, we propose a microstructural model of superhard nanocomposite films, postulating the interconnectivity between individual nanoparticles, presence of defects in the individual grains, and particle size varying in the initial stage of the film growth.