Abstract
In this study we demonstrate a novel approach for the rapid fabricating micro scale metal (silver) patterning directly on a polydimethylsiloxane (PDMS) substrate. Silver nanoparticles were sintered on PDMS to form conductive metal films using laser direct write (LDW) technology. To achieve good metal film quality, a capillarity-assisted laser direct writing (CALDW) of nanoparticle suspensions on a low surface energy material (PDMS) was utilized. Experimental results showed controllable electrical conductivities and good film properties of the sintered silver patterns. This study reveals an advanced method of metal patterning on PDMS, and proposes a new research application of LDW in a nanoparticle colloidal environment. © 2011 IOP Publishing Ltd.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 095018 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 21 |
| Issue number | 9 |
| DOIs | |
| State | Published - Aug 12 2011 |
| Externally published | Yes |
Bibliographical note
KAUST Repository Item: Exported on 2020-10-01Acknowledgements: This work was supported by the King Abdullah University of Science and Technology (KAUST) and the University of California Research Program. The authors want to thank Professor Seung Hwan Ko from Korea Advanced Institute of Science and Technology (KAIST) and Dr Heng Pan for technical assistance related to this study. The authors also want to acknowledge Eunpa Kim for assistance on the atomic force microscopic images presented in this work.
This publication acknowledges KAUST support, but has no KAUST affiliated authors.