Abstract
We report a strategy to fabricate high-density random metallic nanopatterns with accurately controlled nanogaps defined by atomic-layer-deposition and self-assembled-monolayer processes for quantitative chemical and biological sensing with a record-high uniformity over a large area.
Original language | English (US) |
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Title of host publication | Conference on Lasers and Electro-Optics |
Publisher | IEEE |
ISBN (Print) | 978-1-6654-4792-8 |
DOIs | |
State | Published - 2021 |