Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester

Zhiyuan Shen, Shuwei Liu, Jianmin Miao, Lye Sun Woh, Zhihong Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations


This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Print)9781467356558
StatePublished - Jan 2013

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