This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified. © 2013 IEEE.
|Title of host publication
|2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
|Institute of Electrical and Electronics Engineers (IEEE)
|Number of pages
|Published - Jan 2013