Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester

Zhiyuan Shen; Shuwei Liu; Jianmin Miao; Lye Sun Woh; Zhihong Wang

doi:10.1109/MEMSYS.2013.6474369

Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester

Zhiyuan Shen, Shuwei Liu, Jianmin Miao, Lye Sun Woh, Zhihong Wang

Imaging & Characterization Core Lab

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified. © 2013 IEEE.

Original language	English (US)
Title of host publication	2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	821-824
Number of pages	4
ISBN (Print)	9781467356558
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474369
State	Published - Jan 2013

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10.1109/MEMSYS.2013.6474369

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@inproceedings{793d27f28b494a35a8b132acab637da0,

title = "Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester",

abstract = "This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified. {\textcopyright} 2013 IEEE.",

author = "Zhiyuan Shen and Shuwei Liu and Jianmin Miao and Woh, {Lye Sun} and Zhihong Wang",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2013",

month = jan,

doi = "10.1109/MEMSYS.2013.6474369",

language = "English (US)",

isbn = "9781467356558",

pages = "821--824",

booktitle = "2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

}

Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester. / Shen, Zhiyuan; Liu, Shuwei; Miao, Jianmin et al.
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 821-824.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester

AU - Shen, Zhiyuan

AU - Liu, Shuwei

AU - Miao, Jianmin

AU - Woh, Lye Sun

AU - Wang, Zhihong

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2013/1

Y1 - 2013/1

N2 - This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified. © 2013 IEEE.

AB - This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified. © 2013 IEEE.

UR - http://hdl.handle.net/10754/564683

UR - http://ieeexplore.ieee.org/document/6474369/

UR - http://www.scopus.com/inward/record.url?scp=84875414064&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2013.6474369

DO - 10.1109/MEMSYS.2013.6474369

M3 - Conference contribution

SN - 9781467356558

SP - 821

EP - 824

BT - 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester

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