Processing-structure relations for ferroelectric thin films deposited by ion beam sputter deposition

Keyphrases

• Microstructure 100%
• Ion Beam Sputtering 100%
• Ferroelectric Thin Films 100%
• Processing Structure 100%
• Structure Relations 100%
• Depositional System 50%
• Low Temperature Process 50%
• Stoichiometry 50%
• Ion Beam Assisted Deposition 50%
• Potassium Sodium Niobate 50%
• Lead Zirconate Titanate Thin Films 50%
• Controlled Deposition 50%
• Composition Monitoring 50%
• Realtime Composition 50%

Material Science

• Ferroelectric Thin Films 100%
• Sputter Deposition 100%
• Film 100%
• Lead Zirconate Titanate 50%
• Ion Beam Deposition 50%

Engineering

• Microstructure 100%
• Thin Films 100%
• Deposition System 50%
• Titanate 50%
• Defects 50%
• Lead Zirconate 50%