Processing-structure relations for ferroelectric thin films deposited by ion beam sputter deposition

Angus Kingon; Michael Ameen; Orlando Auciello; Kenneth Gifford; Husam Alshareef; Thomas Graettinger; Shanghsien Rou; Philip Hren

doi:10.1080/00150199108007928a

Processing-structure relations for ferroelectric thin films deposited by ion beam sputter deposition

Angus Kingon, Michael Ameen, Orlando Auciello, Kenneth Gifford, Husam Alshareef, Thomas Graettinger, Shanghsien Rou, Philip Hren

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

This paper emphasizes the need to determine the relationships between processing and structure (including microstructure) in ferroelectric thin films. The use of an automated ion beam deposition system is demonstrated, which allows the controlled deposition of films at low processing temperatures. A key feature is the real-time composition monitoring, during deposition, which allows stoichiometry to be precisely controlled. Microstructures (including defects) in KNbO3 and lead zirconate titanate films are investigated, and differences between the two materials emphasized.

Original language	English (US)
Pages (from-to)	35-49
Number of pages	15
Journal	Ferroelectrics
Volume	116
Issue number	1
DOIs	https://doi.org/10.1080/00150199108007928a
State	Published - Apr 1991
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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abstract = "This paper emphasizes the need to determine the relationships between processing and structure (including microstructure) in ferroelectric thin films. The use of an automated ion beam deposition system is demonstrated, which allows the controlled deposition of films at low processing temperatures. A key feature is the real-time composition monitoring, during deposition, which allows stoichiometry to be precisely controlled. Microstructures (including defects) in KNbO3 and lead zirconate titanate films are investigated, and differences between the two materials emphasized.",

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AU - Kingon, Angus

AU - Ameen, Michael

AU - Auciello, Orlando

AU - Gifford, Kenneth

AU - Alshareef, Husam

AU - Graettinger, Thomas

AU - Rou, Shanghsien

AU - Hren, Philip

PY - 1991/4

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N2 - This paper emphasizes the need to determine the relationships between processing and structure (including microstructure) in ferroelectric thin films. The use of an automated ion beam deposition system is demonstrated, which allows the controlled deposition of films at low processing temperatures. A key feature is the real-time composition monitoring, during deposition, which allows stoichiometry to be precisely controlled. Microstructures (including defects) in KNbO3 and lead zirconate titanate films are investigated, and differences between the two materials emphasized.

AB - This paper emphasizes the need to determine the relationships between processing and structure (including microstructure) in ferroelectric thin films. The use of an automated ion beam deposition system is demonstrated, which allows the controlled deposition of films at low processing temperatures. A key feature is the real-time composition monitoring, during deposition, which allows stoichiometry to be precisely controlled. Microstructures (including defects) in KNbO3 and lead zirconate titanate films are investigated, and differences between the two materials emphasized.

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Processing-structure relations for ferroelectric thin films deposited by ion beam sputter deposition

Abstract

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