Abstract
Pressure sensors are among the most widely used devices to collect quantitative feedback during physical interactions of mechanical systems, especially in robotics. In this work, we demonstrate flexible interdigitated capacitive pressure sensors using polydimethylsiloxane (PDMS) as pressure sensitive layer. Furthermore, we investigate the possibility to enhance the sensitivity of the sensors using a PDMS composite with nanoparticles that exhibit a high dielectric permittivity. The interdigitated electrodes are screen-printed and planar. The interdigitated electrode configuration eases the fabrication process flow compared to parallel-plate capacitive sensors, where the electrodes must be deposited twice, and in different layers. Thus, the developed sensors simplify integration and are suitable for a wide range of applications, paving the way towards cost effective flexible pressure sensors.
Original language | English (US) |
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Title of host publication | APSCON 2023 - IEEE Applied Sensing Conference, Symposium Proceedings |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781665461634 |
DOIs | |
State | Published - 2023 |
Event | 2023 IEEE Applied Sensing Conference, APSCON 2023 - Bengaluru, India Duration: Jan 23 2023 → Jan 25 2023 |
Publication series
Name | APSCON 2023 - IEEE Applied Sensing Conference, Symposium Proceedings |
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Conference
Conference | 2023 IEEE Applied Sensing Conference, APSCON 2023 |
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Country/Territory | India |
City | Bengaluru |
Period | 01/23/23 → 01/25/23 |
Bibliographical note
Funding Information:§ Authors contributed equally for this work. This work has been jointly supported by the European Regional Development Fund (ERDF) and REACT-EU under the grant agreement KWF-4127 | 35032 | 51423 (ROSE project) as well as by Silicon Austria Labs (SAL), owned by the Republic of Austria, the Styrian Business Promotion Agency (SFG), the federal state of Carinthia, the Upper Austrian Research (UAR), and the Austrian Association for the Electric and Electronics Industry (FEEI).
Publisher Copyright:
© 2023 IEEE.
Keywords
- capacitive sensors
- Force sensors
- NiZnFeO nanoparticles
- PDMS composite
- Pressure sensors
- robotics
- tactile sensors
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Instrumentation