Positive Tone Nanoparticle Photoresists: New Insight on the Patterning Mechanism

Keyphrases

• Positive Tone 100%
• Patterning Mechanism 100%
• Nanoparticle Photoresist 100%
• Pattern-based Approach 50%
• Novel Class 50%
• Electron Beam 50%
• Electron Beam Lithography 50%
• Ligand Interaction 50%
• Switching Process 50%
• Methacrylate-based 50%
• Negative Tone 50%
• Line Space 50%
• Space Pattern 50%
• EUV Lithography 50%
• Nanoparticle Materials 50%
• Dual Tone 50%

Engineering

• Nanoparticles 100%
• Photoresist 100%
• Patterning Process 50%
• Lithography 50%
• Line Width 50%
• Determines 50%

Material Science

• Nanoparticle 100%
• Linewidth 50%
• Lithography 50%