Polymethylglutarimide as a structural MEMS material

Ian Grant Foulds; R. W. Johnstone; M. Hamidi; S. Tsang; M. Parameswaran

doi:10.1109/CCECE.2007.81

Polymethylglutarimide as a structural MEMS material

Ian Grant Foulds, R. W. Johnstone, M. Hamidi, S. Tsang, M. Parameswaran

Computer, Electrical and Mathematical Sciences and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF ₂ bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.

Original language	English (US)
Title of host publication	2007 Canadian Conference on Electrical and Computer Engineering, CCECD
Pages	300-303
Number of pages	4
DOIs	https://doi.org/10.1109/CCECE.2007.81
State	Published - Dec 1 2007
Event	2007 Canadian Conference on Electrical and Computer Engineering, CCECD - Vancouver, BC, Canada Duration: Apr 22 2007 → Apr 26 2007

Publication series

Name	Canadian Conference on Electrical and Computer Engineering
ISSN (Print)	0840-7789

Other

Other	2007 Canadian Conference on Electrical and Computer Engineering, CCECD
Country/Territory	Canada
City	Vancouver, BC
Period	04/22/07 → 04/26/07

Keywords

Acutator
PMGI
Polymer
Polymethylglutarimide
Structural material

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/CCECE.2007.81

Cite this

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title = "Polymethylglutarimide as a structural MEMS material",

abstract = " This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF 2 bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.",

keywords = "Acutator, PMGI, Polymer, Polymethylglutarimide, Structural material",

author = "Foulds, {Ian Grant} and Johnstone, {R. W.} and M. Hamidi and S. Tsang and M. Parameswaran",

year = "2007",

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doi = "10.1109/CCECE.2007.81",

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Foulds, IG, Johnstone, RW, Hamidi, M, Tsang, S & Parameswaran, M 2007, Polymethylglutarimide as a structural MEMS material. in 2007 Canadian Conference on Electrical and Computer Engineering, CCECD., 4232740, Canadian Conference on Electrical and Computer Engineering, pp. 300-303, 2007 Canadian Conference on Electrical and Computer Engineering, CCECD, Vancouver, BC, Canada, 04/22/07. https://doi.org/10.1109/CCECE.2007.81

Polymethylglutarimide as a structural MEMS material. / Foulds, Ian Grant; Johnstone, R. W.; Hamidi, M. et al.
2007 Canadian Conference on Electrical and Computer Engineering, CCECD. 2007. p. 300-303 4232740 (Canadian Conference on Electrical and Computer Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF 2 bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.

AB - This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF 2 bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.

KW - Acutator

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KW - Polymer

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KW - Structural material

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Polymethylglutarimide as a structural MEMS material

Abstract

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Keywords

ASJC Scopus subject areas

Access to Document

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