Polymethylglutarimide as a structural MEMS material

I. G. Foulds; R. W. Johnstone; M. Hamidi; S. Tsang; M. Parameswaran

doi:10.1109/CCECE.2007.81

Polymethylglutarimide as a structural MEMS material

I. G. Foulds, R. W. Johnstone, M. Hamidi, S. Tsang, M. Parameswaran

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF₂ bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.

Original language	English (US)
Title of host publication	2007 Canadian Conference on Electrical and Computer Engineering, CCECD
Pages	300-303
Number of pages	4
DOIs	https://doi.org/10.1109/CCECE.2007.81
State	Published - 2007
Externally published	Yes
Event	2007 Canadian Conference on Electrical and Computer Engineering, CCECD - Vancouver, BC, Canada Duration: Apr 22 2007 → Apr 26 2007

Publication series

Name	Canadian Conference on Electrical and Computer Engineering
ISSN (Print)	0840-7789

Other

Other	2007 Canadian Conference on Electrical and Computer Engineering, CCECD
Country/Territory	Canada
City	Vancouver, BC
Period	04/22/07 → 04/26/07

Keywords

Acutator
PMGI
Polymer
Polymethylglutarimide
Structural material

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/CCECE.2007.81

Cite this

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title = "Polymethylglutarimide as a structural MEMS material",

abstract = "This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF2 bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.",

keywords = "Acutator, PMGI, Polymer, Polymethylglutarimide, Structural material",

author = "Foulds, {I. G.} and Johnstone, {R. W.} and M. Hamidi and S. Tsang and M. Parameswaran",

year = "2007",

doi = "10.1109/CCECE.2007.81",

language = "English (US)",

isbn = "1424410215",

series = "Canadian Conference on Electrical and Computer Engineering",

pages = "300--303",

booktitle = "2007 Canadian Conference on Electrical and Computer Engineering, CCECD",

note = "2007 Canadian Conference on Electrical and Computer Engineering, CCECD ; Conference date: 22-04-2007 Through 26-04-2007",

}

Foulds, IG, Johnstone, RW, Hamidi, M, Tsang, S & Parameswaran, M 2007, Polymethylglutarimide as a structural MEMS material. in 2007 Canadian Conference on Electrical and Computer Engineering, CCECD., 4232740, Canadian Conference on Electrical and Computer Engineering, pp. 300-303, 2007 Canadian Conference on Electrical and Computer Engineering, CCECD, Vancouver, BC, Canada, 04/22/07. https://doi.org/10.1109/CCECE.2007.81

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T1 - Polymethylglutarimide as a structural MEMS material

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AU - Johnstone, R. W.

AU - Hamidi, M.

AU - Tsang, S.

AU - Parameswaran, M.

PY - 2007

Y1 - 2007

N2 - This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF2 bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.

AB - This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF2 bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.

KW - Acutator

KW - PMGI

KW - Polymer

KW - Polymethylglutarimide

KW - Structural material

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U2 - 10.1109/CCECE.2007.81

DO - 10.1109/CCECE.2007.81

M3 - Conference contribution

AN - SCOPUS:48749106080

SN - 1424410215

SN - 9781424410217

T3 - Canadian Conference on Electrical and Computer Engineering

SP - 300

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BT - 2007 Canadian Conference on Electrical and Computer Engineering, CCECD

T2 - 2007 Canadian Conference on Electrical and Computer Engineering, CCECD

Y2 - 22 April 2007 through 26 April 2007

ER -

Polymethylglutarimide as a structural MEMS material

Abstract

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Keywords

ASJC Scopus subject areas

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