Abstract
In this work, a large area, low cost and flexible polymer/paper-based double touch mode capacitive pressure sensor is demonstrated. Garage fabrication processes are used which only require cutting, taping and assembly of aluminum (Al) coated polyimide (PI) foil, PI tape and double-sided scotch tape. The presented pressure sensor operates in different pressure regions i.e. normal (0 to 7.5 kPa), transition (7.5 to 14.24 kPa), linear (14.24 to 54.9 kPa) and saturation (above 54.9 kPa). The advantages of the demonstrated double touch mode capacitive pressure sensors are low temperature drift, long linear range, high pressure sensitivity, precise pressure measurement and large die area. The linear output along with a high sensitivity range (14.24 to 54.9 kPa pressure range) of the sensor are utilized to wirelessly control the movement of a robotic arm with precise rotation and tilt movement capabilities.
| Original language | English (US) |
|---|---|
| Title of host publication | 2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) |
| Publisher | IEEE |
| ISBN (Print) | 978-1-7281-7231-6 |
| DOIs | |
| State | Published - 2020 |
Bibliographical note
KAUST Repository Item: Exported on 2020-12-02Acknowledged KAUST grant number(s): OSR-2015-Sensors-2707, OSR-2016-KKI-2880.
Acknowledgements: This work is supported by the King Abdullah University of Science and Technology (KAUST) Office of Sponsored Research (OSR) under Sensor Innovation Initiative Award No. OSR-2015-Sensors-2707 and KAUST–KFUPM Special Initiative Award No. OSR-2016-KKI-2880.