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Polymer-free patterning of graphene at sub-10-nm scale by low-energy repetitive electron beam
Yann Wen Lan, Wen Hao Chang, Bo Tang Xiao, Bo Wei Liang, Jyun Hong Chen, Pei Hsun Jiang, Lain Jong Li, Ya Wen Su, Yuan Liang Zhong, Chii Dong Chen*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
14
Scopus
citations