Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

I. G. Foulds; R. W. Johnstone; S. H. Tsang; M. Hamidi; M. Parameswaran

doi:10.1088/0960-1317/18/4/045026

Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

I. G. Foulds, R. W. Johnstone, S. H. Tsang, M. Hamidi, M. Parameswaran

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

This work investigates the use of polydimethylglutarimide, or PMGI, as a structural material for surface micromachining. PMGI is a commercially available, positive-toned deep-UV resist designed for use in bi-layer lift-off techniques. This paper presents a technique for the microfabrication of free-standing PMGI structures, and uses those structures to extract the coefficient of thermal expansion and Young's modulus for PMGI. Our study found PMGI's coefficient of thermal expansion to be 56 6 ppm °C^-1 and Young's modulus to be 5.0 0.5 GPa. Active structures were also fabricated by including a patterned metal layer. This allows the fabrication of active devices, such as bent-beam actuators. PMGI is a commercially available polymer being used in micromachining, and this paper provides the first report of its thermo-mechanical properties.

Original language	English (US)
Article number	045026
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	4
DOIs	https://doi.org/10.1088/0960-1317/18/4/045026
State	Published - Apr 1 2008
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/18/4/045026

Cite this

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abstract = "This work investigates the use of polydimethylglutarimide, or PMGI, as a structural material for surface micromachining. PMGI is a commercially available, positive-toned deep-UV resist designed for use in bi-layer lift-off techniques. This paper presents a technique for the microfabrication of free-standing PMGI structures, and uses those structures to extract the coefficient of thermal expansion and Young's modulus for PMGI. Our study found PMGI's coefficient of thermal expansion to be 56 6 ppm °C-1 and Young's modulus to be 5.0 0.5 GPa. Active structures were also fabricated by including a patterned metal layer. This allows the fabrication of active devices, such as bent-beam actuators. PMGI is a commercially available polymer being used in micromachining, and this paper provides the first report of its thermo-mechanical properties.",

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AU - Johnstone, R. W.

AU - Tsang, S. H.

AU - Hamidi, M.

AU - Parameswaran, M.

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Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

Abstract

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