Polarization-independent all-silicon dielectric metasurfaces in the terahertz regime

Huifang Zhang, Xueqian Zhang, Quan Xu, Qiu Wang, Yuehong Xu, Minggui Wei, Yanfeng Li, Jianqiang Gu, Zhen Tian, Chunmei Ouyang, Xixiang Zhang, Cong Hu, Jiaguang Han, Weili Zhang

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86 Scopus citations


Dielectric metasurfaces have achieved great success in realizing high-efficiency wavefront control in the optical and infrared ranges. Here, we experimentally demonstrate several efficient, polarization-independent, all-silicon dielectric metasurfaces in the terahertz regime. The metasurfaces are composed of cylindrical silicon pillars on a silicon substrate, which can be easily fabricated using etching technology for semiconductors. By locally tailoring the diameter of the pillars, full control over abrupt phase changes can be achieved. To show the controlling ability of the metasurfaces, an anomalous deflector, three Bessel beam generators, and three vortex beam generators are fabricated and characterized. We also show that the proposed metasurfaces can be easily combined to form composite devices with extended functionalities. The proposed controlling method has promising applications in developing low-loss, ultra-compact spatial terahertz modulation devices. (C) 2017 Chinese Laser Press
Original languageEnglish (US)
Pages (from-to)24
JournalPhotonics Research
Issue number1
StatePublished - Dec 12 2017

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: National Basic Research Program of China (2014CB339800); National Natural Science Foundation of China (NSFC) (61420106006, 61422509, 61605143, 61622505, 61675145, 61735012); Program for Changjiang Scholars and Innovative Research Team in University (IRT13033); Major National Development Project of Scientific Instruments and Equipment (2011YQ150021); Guangxi Key Laboratory of Automatic Detecting Technology and Instruments (YQ17203).


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