TY - GEN
T1 - Piezoelectric transducer array microspeaker
AU - Carreno, Armando Arpys Arevalo
AU - Conchouso Gonzalez, David
AU - Castro, David
AU - Kosel, Jürgen
AU - Foulds, Ian G.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2016/12/19
Y1 - 2016/12/19
N2 - In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
AB - In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
UR - http://hdl.handle.net/10754/622587
UR - http://ieeexplore.ieee.org/document/7758227/
UR - http://www.scopus.com/inward/record.url?scp=85007256352&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2016.7758227
DO - 10.1109/NEMS.2016.7758227
M3 - Conference contribution
SN - 9781509019472
SP - 180
EP - 183
BT - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -