Physical and barrier properties of amorphous silicon-oxycarbide deposited by PECVD from octamethylcyclotetrasiloxane

Chiu Chih Chiang*, Mao Chieh Chen, Lain Jong Li, Zhen Cheng Wu, Syun Ming Jang, Mong Song Liang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

29 Scopus citations

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