Photo-Cross-Linking of Poly(4-hydroxystyrene) via Electrophilic Aromatic Substitution: Use of Polyfunctional Benzylic Alcohols in the Design of Chemically Amplified Resist Materials with Tunable Sensitivities

S. Ming Lee, Jean M.J. Fréchet, C. Grant Willson*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Material Science

Chemical Engineering

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