Pattern and feature designed growth of ZnO nanowire arrays for vertical devices

H. He, Ju H. Hsu, Chun W. Wang, Heh N. Lih, Lib J. Chen*, Zhong L. Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

127 Scopus citations


An approach is demonstrated for growing aligned ZnO nanowire/nanorod arrays following a predesigned pattern and feature with controlled site, shape, distribution, and orientation. The technique relies on an integration of atomic force microscopy (AFM) nanomachining with catalytically activated vapor-liquid-solid (VLS) growth. The pattern and growth locations are defined by the catalyst distribution created by AFM, and the orientation is determined by the epitaxial growth on a single-crystal substrate. The technique opens a variety of possibilities of using nanowire arrays as sensor arrays, piezoelectric antenna arrays, nanolasers, photonic band gap crystal, biosensors, and field emitters with controlled density, location, shape, and distribution according to a designed pattern and feature.

Original languageEnglish (US)
Pages (from-to)50-53
Number of pages4
JournalJournal of Physical Chemistry B
Issue number1
StatePublished - Jan 12 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Materials Chemistry


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