Parameter identification of an electrically actuated imperfect microbeam

Engineering

• Computer Simulation 100%
• Microfabrication 50%
• Polysilicon 50%
• Frequency Domain 50%
• Nonlinearity 50%
• Microstructure 50%
• Data Show 50%
• Model Parameter 50%
• Applicability 50%
• Frequency Response Curve 50%
• Reduced Order Model 50%
• Experimental Response 50%
• Salient Feature 50%
• Symmetric Mode 50%
• Linear Analysis 50%
• Parametric Identification 50%

Keyphrases

• Comparison with Experimental Data 33%
• Parametric Identification 33%
• Similar Cases 33%
• Identification Process 33%
• Frequency Values 33%

Material Science

• Microfabrication 100%