Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

E. M A Fuentes-Fernandez, Leonardo Aurelio Baldenegro-Pérez, Manuel Angel Quevedo Quevedo-López, Bruce E. Gnade, Abhiman Hande, Pradeep Shah, Husam N. Alshareef

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