Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

E. M A Fuentes-Fernandez; Leonardo Aurelio Baldenegro-Pérez; Manuel Angel Quevedo Quevedo-López; Bruce E. Gnade; Abhiman Hande; Pradeep Shah; Husam N. Alshareef

doi:10.1016/j.sse.2011.05.027

Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

E. M A Fuentes-Fernandez, Leonardo Aurelio Baldenegro-Pérez, Manuel Angel Quevedo Quevedo-López, Bruce E. Gnade, Abhiman Hande, Pradeep Shah, Husam N. Alshareef

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. © 2011 Elsevier Ltd. All rights reserved.

Original language	English (US)
Pages (from-to)	89-93
Number of pages	5
Journal	Solid-State Electronics
Volume	63
Issue number	1
DOIs	https://doi.org/10.1016/j.sse.2011.05.027
State	Published - Sep 2011

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.

ASJC Scopus subject areas

Materials Chemistry
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Condensed Matter Physics

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10.1016/j.sse.2011.05.027

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@article{2896693b959e4782bcc561f32fff14ce,

title = "Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers",

abstract = "Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. {\textcopyright} 2011 Elsevier Ltd. All rights reserved.",

author = "Fuentes-Fernandez, {E. M A} and Baldenegro-P{\'e}rez, {Leonardo Aurelio} and Quevedo-L{\'o}pez, {Manuel Angel Quevedo} and Gnade, {Bruce E.} and Abhiman Hande and Pradeep Shah and Alshareef, {Husam N.}",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.",

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doi = "10.1016/j.sse.2011.05.027",

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AU - Fuentes-Fernandez, E. M A

AU - Baldenegro-Pérez, Leonardo Aurelio

AU - Quevedo-López, Manuel Angel Quevedo

AU - Gnade, Bruce E.

AU - Hande, Abhiman

AU - Shah, Pradeep

AU - Alshareef, Husam N.

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.

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N2 - Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. © 2011 Elsevier Ltd. All rights reserved.

AB - Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. © 2011 Elsevier Ltd. All rights reserved.

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Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

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