Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

E. M A Fuentes-Fernandez, Leonardo Aurelio Baldenegro-Pérez, Manuel Angel Quevedo Quevedo-López, Bruce E. Gnade, Abhiman Hande, Pradeep Shah, Husam N. Alshareef

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. © 2011 Elsevier Ltd. All rights reserved.
Original languageEnglish (US)
Pages (from-to)89-93
Number of pages5
JournalSolid-State Electronics
Issue number1
StatePublished - Sep 2011

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.

ASJC Scopus subject areas

  • Materials Chemistry
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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