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On the structure-property inter-relationships of metal gate electrodes for future generation CMOS
Prashant Majhi*, Husam Alshareef, Huang Chun Wen, Kisik Choi, Patrick Lysaght, Craig Huffman, Hongfa Luan, Rusty Harris, Byoung Hun Lee, Chuck Ramiller
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review