On-demand patterning of nanostructured pentacene transistors by scanning thermal lithography

Joseph E. Shaw; Paul N. Stavrinou; Thomas D. Anthopoulos

doi:10.1002/adma.201202877

On-demand patterning of nanostructured pentacene transistors by scanning thermal lithography

Joseph E. Shaw, Paul N. Stavrinou, Thomas D. Anthopoulos^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Thermal scanning lithography is used to pattern semiconducting nanoribbon-like pentacene structures with ultrahigh spatial resolution onto arbitrary substrates in air. The method allows control of the pentacene crystal growth direction and domain-size distribution. By combining these quasi-one-dimensional nanoribbon-like structures with conductive electrodes and a suitable gate dielectric, functional p-channel transistors are demonstrated.

Original language	English (US)
Pages (from-to)	552-558
Number of pages	7
Journal	Advanced Materials
Volume	25
Issue number	4
DOIs	https://doi.org/10.1002/adma.201202877
State	Published - Jan 25 2013
Externally published	Yes

Keywords

nanolithography
organic semiconductors
pentacene transistors
scanning thermal lithography
thermochemical lithography

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.201202877

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title = "On-demand patterning of nanostructured pentacene transistors by scanning thermal lithography",

abstract = "Thermal scanning lithography is used to pattern semiconducting nanoribbon-like pentacene structures with ultrahigh spatial resolution onto arbitrary substrates in air. The method allows control of the pentacene crystal growth direction and domain-size distribution. By combining these quasi-one-dimensional nanoribbon-like structures with conductive electrodes and a suitable gate dielectric, functional p-channel transistors are demonstrated.",

keywords = "nanolithography, organic semiconductors, pentacene transistors, scanning thermal lithography, thermochemical lithography",

author = "Shaw, {Joseph E.} and Stavrinou, {Paul N.} and Anthopoulos, {Thomas D.}",

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AU - Shaw, Joseph E.

AU - Stavrinou, Paul N.

AU - Anthopoulos, Thomas D.

PY - 2013/1/25

Y1 - 2013/1/25

N2 - Thermal scanning lithography is used to pattern semiconducting nanoribbon-like pentacene structures with ultrahigh spatial resolution onto arbitrary substrates in air. The method allows control of the pentacene crystal growth direction and domain-size distribution. By combining these quasi-one-dimensional nanoribbon-like structures with conductive electrodes and a suitable gate dielectric, functional p-channel transistors are demonstrated.

AB - Thermal scanning lithography is used to pattern semiconducting nanoribbon-like pentacene structures with ultrahigh spatial resolution onto arbitrary substrates in air. The method allows control of the pentacene crystal growth direction and domain-size distribution. By combining these quasi-one-dimensional nanoribbon-like structures with conductive electrodes and a suitable gate dielectric, functional p-channel transistors are demonstrated.

KW - nanolithography

KW - organic semiconductors

KW - pentacene transistors

KW - scanning thermal lithography

KW - thermochemical lithography

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DO - 10.1002/adma.201202877

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JO - Advanced Materials

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ER -

On-demand patterning of nanostructured pentacene transistors by scanning thermal lithography

Abstract

Keywords

ASJC Scopus subject areas

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