On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses

Yanfen Zhai, Takashi Sasaki, Mohssen Moridi, Ronghui Lin, Zahrah Alnakhli, Atif Shamim, Xiaohang Li, Mohammad I. Younis, Kazuhiro Hane, Lixiang Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An on-chip photoacoustic transducer is proposed by monolithically integrating piezoelectric micromachined ultrasonic transducers (PMUTs) on metasurface lenses for applications such as single-cell metabolic photoacoustic microscopy (SCM-PAM)1 . As shown in Figure 1a, every PMUT cell has a ring-shaped top electrode, and the membrane center is transparent without piezoelectric and electrode materials. The laser beam, therefore, can travel through a PMUT cell after being focused by a metasurface lens bonded on the backside of the PMUT (see Figure.3). The on-chip photoacoustic transducer fully leverages current PMUT and metasurface technologies and does not rely on transparent piezoelectric and electrode materials like typical transparent ultrasonic transducers2 . Moreover, the on-chip photoacoustic transducer has a monolithic integrated achromatic metasurface lens (see Figure 3), which can easily and efficiently focus the visible light (wavelength range: 400-700 nm) at the same focus point. Design and process this and preliminarily test the performance of PMUT and metasurface.
Original languageEnglish (US)
Title of host publicationPhotons Plus Ultrasound: Imaging and Sensing 2023
PublisherSPIE
DOIs
StatePublished - Mar 9 2023

Bibliographical note

KAUST Repository Item: Exported on 2023-03-15
Acknowledgements: We thank Waleed Maqsood for testing PMUT. Thanks to Javad Abbaszadeh for designing the PCB and helping with the vibration measurement.

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