Novel fabrication method for three-dimensional nanostructuring: An application to micro-optics

Massimo Tormen*, Alessandro Carpentiero, Enrico Ferrari, Dan Cojoc, Enzo Di Fabrizio

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D structures with very accurate shape control and nanometer scale surface roughness. The resulting concavities at the quartz surface are converted into convex plastic elements by hot embossing or casting techniques. Complex all-polymer refractive optical elements have been realized by this method. Upon illumination, such micro-optics focus the light into predetermined 3D distributions of focal lines and spots. The general fabrication scheme explored here is illustrated through a series of examples in optics, but is expected to offer new solutions to other fields such as medicine, microfluidics and nano-optics.

Original languageEnglish (US)
Article number385301
Issue number38
StatePublished - Sep 26 2007
Externally publishedYes

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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