Abstract
A new chemically amplified polymeric imaging system based on polymers containing t-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl (vinylbenzyl)benzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. Imaging experiments confirm that the materials have very high sensitivities when exposed to UV radiation near 250nm.
Original language | English (US) |
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Pages (from-to) | 475-482 |
Number of pages | 8 |
Journal | Polymer Bulletin |
Volume | 37 |
Issue number | 4 |
DOIs | |
State | Published - Oct 1996 |
Externally published | Yes |
ASJC Scopus subject areas
- General Chemistry
- Condensed Matter Physics
- Polymers and Plastics
- Materials Chemistry