Abstract
This work presents a nonparametric identification method applied to study the nonlinear response of an MEMS resonator. The MEMS resonator is a clamped-clamped microbeam fabricated for out-of-plane motion accounting for geometric nonlinearities due to midplane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency-response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at electrostatic AC and DC voltages.
Original language | English (US) |
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Title of host publication | NODYCON Conference Proceedings Series |
Publisher | Springer International Publishing |
Pages | 405-415 |
Number of pages | 11 |
ISBN (Print) | 9783030811655 |
DOIs | |
State | Published - Jan 1 2022 |