This work presents a nonparametric identification method applied to study the nonlinear response of an MEMS resonator. The MEMS resonator is a clamped-clamped microbeam fabricated for out-of-plane motion accounting for geometric nonlinearities due to midplane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency-response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at electrostatic AC and DC voltages.
|Original language||English (US)|
|Title of host publication||NODYCON Conference Proceedings Series|
|Publisher||Springer International Publishing|
|Number of pages||11|
|State||Published - Jan 1 2022|