Nonparametric identification of a micro-electromechanical resonator

Rodrigo Tumolin Rocha; Feras Alfosail; Wen Zhao; Mohammad I. Younis; Sami F. Masri

doi:10.1016/j.ymssp.2021.107932

Nonparametric identification of a micro-electromechanical resonator

Rodrigo Tumolin Rocha, Feras Alfosail, Wen Zhao, Mohammad I. Younis, Sami F. Masri

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

This work presents a nonparametric identification method to study the nonlinear response of a micro-electromechanical system (MEMS) resonator. The MEMS resonator is a clamped–clamped microbeam fabricated for out-of-plane motion, which is dominated by the cubic nonlinearity due to mid-plane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency–response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at different electrostatic AC and DC voltages.

Original language	English (US)
Pages (from-to)	107932
Journal	Mechanical Systems and Signal Processing
Volume	161
DOIs	https://doi.org/10.1016/j.ymssp.2021.107932
State	Published - Apr 22 2021

Bibliographical note

KAUST Repository Item: Exported on 2021-04-26
Acknowledgements: This publication is based upon work supported by King Abdullah University of Science and Technology (KAUST).

ASJC Scopus subject areas

Signal Processing
Civil and Structural Engineering
Mechanical Engineering
Control and Systems Engineering
Computer Science Applications
Aerospace Engineering

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10.1016/j.ymssp.2021.107932

https://repository.kaust.edu.sa/bitstream/10754/668907/1/Rocha-etal-2021-Accepted_version.pdf

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title = "Nonparametric identification of a micro-electromechanical resonator",

abstract = "This work presents a nonparametric identification method to study the nonlinear response of a micro-electromechanical system (MEMS) resonator. The MEMS resonator is a clamped–clamped microbeam fabricated for out-of-plane motion, which is dominated by the cubic nonlinearity due to mid-plane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency–response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at different electrostatic AC and DC voltages.",

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T1 - Nonparametric identification of a micro-electromechanical resonator

AU - Rocha, Rodrigo Tumolin

AU - Alfosail, Feras

AU - Zhao, Wen

AU - Younis, Mohammad I.

AU - Masri, Sami F.

N1 - KAUST Repository Item: Exported on 2021-04-26 Acknowledgements: This publication is based upon work supported by King Abdullah University of Science and Technology (KAUST).

PY - 2021/4/22

Y1 - 2021/4/22

N2 - This work presents a nonparametric identification method to study the nonlinear response of a micro-electromechanical system (MEMS) resonator. The MEMS resonator is a clamped–clamped microbeam fabricated for out-of-plane motion, which is dominated by the cubic nonlinearity due to mid-plane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency–response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at different electrostatic AC and DC voltages.

AB - This work presents a nonparametric identification method to study the nonlinear response of a micro-electromechanical system (MEMS) resonator. The MEMS resonator is a clamped–clamped microbeam fabricated for out-of-plane motion, which is dominated by the cubic nonlinearity due to mid-plane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency–response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at different electrostatic AC and DC voltages.

UR - http://hdl.handle.net/10754/668907

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SP - 107932

JO - Mechanical Systems and Signal Processing

JF - Mechanical Systems and Signal Processing

ER -

Nonparametric identification of a micro-electromechanical resonator

Abstract

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