Nonlinear dynamics of a MEMS resonator: Theoretical and experimental investigation

Engineering

• Microfabrication 100%
• Theoretical Investigation 100%
• Attractor 100%
• Experimental Investigation 100%
• Experiments 100%
• Non-Linear Dynamics 100%
• Polysilicon 50%
• Electric Potential 50%
• Frequency Response 50%
• Natural Frequency 50%
• Sweep Frequency 50%
• Reduced Order Model 50%
• Theoretical Curve 50%
• Prediction 50%
• Simulation 50%
• Neighbourhood 50%

Physics

• Microelectromechanical System 100%
• Microbeam 100%
• Electric Potential 50%
• Resonant Frequencies 50%
• Electrodynamics 50%
• Defects 50%
• Frequencies 50%
• Simulation 50%
• Diagrams 50%
• Information 50%
• Responses 50%
• Parameter 50%
• Laser 50%
• Existence 50%

Computer Science

• Natural Frequency 50%
• Desired Outcome 50%
• Frequency Response 50%
• Theoretical Curve 50%
• Simulation 50%
• Channel Doppler 50%