TY - JOUR
T1 - Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection
AU - Bouchaala, Adam M.
AU - Jaber, Nizar
AU - Yassine, Omar
AU - Shekhah, Osama
AU - Chernikova, Valeriya
AU - Eddaoudi, Mohamed
AU - Younis, Mohammad I.
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This research has been supported by KAUST.
PY - 2016/5/25
Y1 - 2016/5/25
N2 - The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
AB - The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
UR - http://hdl.handle.net/10754/611783
UR - http://www.mdpi.com/1424-8220/16/6/758
UR - http://www.scopus.com/inward/record.url?scp=84969899064&partnerID=8YFLogxK
U2 - 10.3390/s16060758
DO - 10.3390/s16060758
M3 - Article
C2 - 27231914
SN - 1424-8220
VL - 16
SP - 758
JO - Sensors
JF - Sensors
IS - 6
ER -