Abstract
Microsystems often require switches or mechanisms to provide two stable states. In answer to this need, we design a novel micro-mechanical bistable switch based on the locking mechanism commonly used in extension ladders. This switch was designed and fabricated through the multiuser MEMS processes (MUMPs). Actual performance of the switch was videotaped, analyzed, and compared with theory and simulation. This design was fully functional on the first design iteration, and can easily be extended to provide multiple stable states. We outline the design, simulation, and results from the testing of the microfabricated system.
Original language | English (US) |
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Pages (from-to) | 255-258 |
Number of pages | 4 |
Journal | Journal of Microlithography, Microfabrication and Microsystems |
Volume | 2 |
Issue number | 4 |
DOIs | |
State | Published - 2003 |
Externally published | Yes |
Keywords
- Bistable
- MEMS
- Multi-stable
- Optics
- Relay
- Surface micromachine
- Switch
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering