High spatial band-gap tuning has been observed from an InGaAsGaAs quantum-dot (QD) structure implanted with electrically neutral species, As and P ions, at 200 °C followed by a rapid thermal annealing. Phosphorous was found to be a more effective species to induce QD intermixing than the As at similar dose level. A blueshift as large as 126 meV has been observed from the P+ -implanted and intermixed sample, while only ∼14 meV has been measured from the Six Ny -capped sample.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)