Nanometer focusing of hard x rays by phase zone plates

W. Yun*, B. Lai, Z. Cai, J. Maser, D. Legnini, E. Gluskin, Z. Chen, A. A. Krasnoperova, Y. Vladimirsky, F. Cerrina, E. Di Fabrizio, M. Gentili

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

214 Scopus citations


Focusing of 8 keV x rays to a spot size of 150 and 90 nm full width at half maximum have been demonstrated at the first- and third-order foci, respectively, of a phase zone plate (PZP). The PZP has a numerical aperture of 1.5 mrad and focusing efficiency of 13% for 8 keV x rays. A flux density gain of 121 000 was obtained at the first-order focus. In this article, the fabrication of the PZP and its experimental characterization are presented and some special applications are discussed.

Original languageEnglish (US)
Pages (from-to)2238-2241
Number of pages4
JournalReview of Scientific Instruments
Issue number5
StatePublished - 1999
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation


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