Nanoimprint lithography for high-efficiency thin-film silicon solar cells

Corsin Battaglia; Jordi Escarré; Karin Söderström; Lukas Erni; Laura Ding; Grégory Bugnon; Adrian Billet; Mathieu Boccard; Loris Barraud; Stefaan De Wolf; Franz Josef Haug; Matthieu Despeisse; Christophe Ballif

doi:10.1021/nl1037787

Nanoimprint lithography for high-efficiency thin-film silicon solar cells

Corsin Battaglia^*, Jordi Escarré, Karin Söderström, Lukas Erni, Laura Ding, Grégory Bugnon, Adrian Billet, Mathieu Boccard, Loris Barraud, Stefaan De Wolf, Franz Josef Haug, Matthieu Despeisse, Christophe Ballif

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

170 Scopus citations

Abstract

We demonstrate high-efficiency thin-film silicon solar cells with transparent nanotextured front electrodes fabricated via ultraviolet nanoimprint lithography on glass substrates. By replicating the morphology of state-of-the-art nanotextured zinc oxide front electrodes known for their exceptional light trapping properties, conversion efficiencies of up to 12.0% are achieved for micromorph tandem junction cells. Excellent light incoupling results in a remarkable summed short-circuit current density of 25.9 mA/cm ² for amorphous top cell and microcrystalline bottom cell thicknesses of only 250 and 1100 nm, respectively. As efforts to maximize light harvesting continue, our study validates nanoimprinting as a versatile tool to investigate nanophotonic effects of a large variety of nanostructures directly on device performance.

Original language	English (US)
Pages (from-to)	661-665
Number of pages	5
Journal	Nano Letters
Volume	11
Issue number	2
DOIs	https://doi.org/10.1021/nl1037787
State	Published - Feb 9 2011
Externally published	Yes

Keywords

Photovoltaics
light trapping
micromorph tandem junction
nanoimprinting
thin-film silicon solar cells

ASJC Scopus subject areas

Bioengineering
General Chemistry
General Materials Science
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl1037787

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title = "Nanoimprint lithography for high-efficiency thin-film silicon solar cells",

abstract = "We demonstrate high-efficiency thin-film silicon solar cells with transparent nanotextured front electrodes fabricated via ultraviolet nanoimprint lithography on glass substrates. By replicating the morphology of state-of-the-art nanotextured zinc oxide front electrodes known for their exceptional light trapping properties, conversion efficiencies of up to 12.0% are achieved for micromorph tandem junction cells. Excellent light incoupling results in a remarkable summed short-circuit current density of 25.9 mA/cm 2 for amorphous top cell and microcrystalline bottom cell thicknesses of only 250 and 1100 nm, respectively. As efforts to maximize light harvesting continue, our study validates nanoimprinting as a versatile tool to investigate nanophotonic effects of a large variety of nanostructures directly on device performance.",

keywords = "Photovoltaics, light trapping, micromorph tandem junction, nanoimprinting, thin-film silicon solar cells",

author = "Corsin Battaglia and Jordi Escarr{\'e} and Karin S{\"o}derstr{\"o}m and Lukas Erni and Laura Ding and Gr{\'e}gory Bugnon and Adrian Billet and Mathieu Boccard and Loris Barraud and {De Wolf}, Stefaan and Haug, {Franz Josef} and Matthieu Despeisse and Christophe Ballif",

year = "2011",

month = feb,

day = "9",

doi = "10.1021/nl1037787",

language = "English (US)",

volume = "11",

pages = "661--665",

journal = "Nano Letters",

issn = "1530-6984",

publisher = "American Chemical Society",

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TY - JOUR

T1 - Nanoimprint lithography for high-efficiency thin-film silicon solar cells

AU - Battaglia, Corsin

AU - Escarré, Jordi

AU - Söderström, Karin

AU - Erni, Lukas

AU - Ding, Laura

AU - Bugnon, Grégory

AU - Billet, Adrian

AU - Boccard, Mathieu

AU - Barraud, Loris

AU - De Wolf, Stefaan

AU - Haug, Franz Josef

AU - Despeisse, Matthieu

AU - Ballif, Christophe

PY - 2011/2/9

Y1 - 2011/2/9

N2 - We demonstrate high-efficiency thin-film silicon solar cells with transparent nanotextured front electrodes fabricated via ultraviolet nanoimprint lithography on glass substrates. By replicating the morphology of state-of-the-art nanotextured zinc oxide front electrodes known for their exceptional light trapping properties, conversion efficiencies of up to 12.0% are achieved for micromorph tandem junction cells. Excellent light incoupling results in a remarkable summed short-circuit current density of 25.9 mA/cm 2 for amorphous top cell and microcrystalline bottom cell thicknesses of only 250 and 1100 nm, respectively. As efforts to maximize light harvesting continue, our study validates nanoimprinting as a versatile tool to investigate nanophotonic effects of a large variety of nanostructures directly on device performance.

AB - We demonstrate high-efficiency thin-film silicon solar cells with transparent nanotextured front electrodes fabricated via ultraviolet nanoimprint lithography on glass substrates. By replicating the morphology of state-of-the-art nanotextured zinc oxide front electrodes known for their exceptional light trapping properties, conversion efficiencies of up to 12.0% are achieved for micromorph tandem junction cells. Excellent light incoupling results in a remarkable summed short-circuit current density of 25.9 mA/cm 2 for amorphous top cell and microcrystalline bottom cell thicknesses of only 250 and 1100 nm, respectively. As efforts to maximize light harvesting continue, our study validates nanoimprinting as a versatile tool to investigate nanophotonic effects of a large variety of nanostructures directly on device performance.

KW - Photovoltaics

KW - light trapping

KW - micromorph tandem junction

KW - nanoimprinting

KW - thin-film silicon solar cells

UR - http://www.scopus.com/inward/record.url?scp=79851503921&partnerID=8YFLogxK

U2 - 10.1021/nl1037787

DO - 10.1021/nl1037787

M3 - Article

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SN - 1530-6984

VL - 11

SP - 661

EP - 665

JO - Nano Letters

JF - Nano Letters

IS - 2

ER -

Nanoimprint lithography for high-efficiency thin-film silicon solar cells

Abstract

Keywords

ASJC Scopus subject areas

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