Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides

M. T. Todaro; T. Stomeo; V. Vitale; M. DeVittorio; A. Passaseo; R. Cingolani; F. Romanato; L. Businaro; E. Di Fabrizio

doi:10.1016/S0167-9317(03)00173-4

Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides

M. T. Todaro^*, T. Stomeo, V. Vitale, M. DeVittorio, A. Passaseo, R. Cingolani, F. Romanato, L. Businaro, E. Di Fabrizio

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

14 Scopus citations

Abstract

We present the fabrication of high refractive index contrast two-dimensional photonic crystal (2D-PC) slab waveguides. 2D photonic crystal structures, consisting of a periodic array of holes in a GaAs matrix, are obtained by nanopatterning of epitaxially grown GaAs/AlGaAs heterostructures. Two different PC structures will be described in detail: (i) an asymmetric 2D-PC slab waveguide obtained by selective oxidation which transforms the Al-rich AlGaAs cladding layer underneath the PCs into aluminium oxide and (ii) a symmetric 2D-PC slab waveguide obtained by removing the oxide (free standing structure).

Original language	English (US)
Pages (from-to)	670-675
Number of pages	6
Journal	Microelectronic Engineering
Volume	67-68
DOIs	https://doi.org/10.1016/S0167-9317(03)00173-4
State	Published - Jun 2003
Externally published	Yes
Event	Proceedings of the 28th International Conference on MNE - Lugano, Switzerland Duration: Sep 16 2002 → Sep 19 2002

Keywords

GaAs/AlGaAs
Oxidation
Photonic crystal
Waveguide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/S0167-9317(03)00173-4

Cite this

@article{ebfb53cb3df24c97be41f0e2ecb0c705,

title = "Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides",

abstract = "We present the fabrication of high refractive index contrast two-dimensional photonic crystal (2D-PC) slab waveguides. 2D photonic crystal structures, consisting of a periodic array of holes in a GaAs matrix, are obtained by nanopatterning of epitaxially grown GaAs/AlGaAs heterostructures. Two different PC structures will be described in detail: (i) an asymmetric 2D-PC slab waveguide obtained by selective oxidation which transforms the Al-rich AlGaAs cladding layer underneath the PCs into aluminium oxide and (ii) a symmetric 2D-PC slab waveguide obtained by removing the oxide (free standing structure).",

keywords = "GaAs/AlGaAs, Oxidation, Photonic crystal, Waveguide",

author = "Todaro, {M. T.} and T. Stomeo and V. Vitale and M. DeVittorio and A. Passaseo and R. Cingolani and F. Romanato and L. Businaro and {Di Fabrizio}, E.",

year = "2003",

month = jun,

doi = "10.1016/S0167-9317(03)00173-4",

language = "English (US)",

volume = "67-68",

pages = "670--675",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "ELSEVIER SCIENCE BV",

note = "Proceedings of the 28th International Conference on MNE ; Conference date: 16-09-2002 Through 19-09-2002",

}

TY - JOUR

T1 - Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides

AU - Todaro, M. T.

AU - Stomeo, T.

AU - Vitale, V.

AU - DeVittorio, M.

AU - Passaseo, A.

AU - Cingolani, R.

AU - Romanato, F.

AU - Businaro, L.

AU - Di Fabrizio, E.

PY - 2003/6

Y1 - 2003/6

N2 - We present the fabrication of high refractive index contrast two-dimensional photonic crystal (2D-PC) slab waveguides. 2D photonic crystal structures, consisting of a periodic array of holes in a GaAs matrix, are obtained by nanopatterning of epitaxially grown GaAs/AlGaAs heterostructures. Two different PC structures will be described in detail: (i) an asymmetric 2D-PC slab waveguide obtained by selective oxidation which transforms the Al-rich AlGaAs cladding layer underneath the PCs into aluminium oxide and (ii) a symmetric 2D-PC slab waveguide obtained by removing the oxide (free standing structure).

AB - We present the fabrication of high refractive index contrast two-dimensional photonic crystal (2D-PC) slab waveguides. 2D photonic crystal structures, consisting of a periodic array of holes in a GaAs matrix, are obtained by nanopatterning of epitaxially grown GaAs/AlGaAs heterostructures. Two different PC structures will be described in detail: (i) an asymmetric 2D-PC slab waveguide obtained by selective oxidation which transforms the Al-rich AlGaAs cladding layer underneath the PCs into aluminium oxide and (ii) a symmetric 2D-PC slab waveguide obtained by removing the oxide (free standing structure).

KW - GaAs/AlGaAs

KW - Oxidation

KW - Photonic crystal

KW - Waveguide

UR - http://www.scopus.com/inward/record.url?scp=0037682246&partnerID=8YFLogxK

U2 - 10.1016/S0167-9317(03)00173-4

DO - 10.1016/S0167-9317(03)00173-4

M3 - Conference article

AN - SCOPUS:0037682246

SN - 0167-9317

VL - 67-68

SP - 670

EP - 675

JO - Microelectronic Engineering

JF - Microelectronic Engineering

T2 - Proceedings of the 28th International Conference on MNE

Y2 - 16 September 2002 through 19 September 2002

ER -

Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides

Abstract

Keywords

ASJC Scopus subject areas

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