Nanoelectromechanical resonator for logic operations

Syed N.R. Kazmi; Md A.Al Hafiz; Karumbaiah N. Chappanda; Saad Ilyas; Jorge Holguin; Pedro M.F.J. Costa; Mohammad I. Younis

doi:10.1109/NEMS.2017.8016963

Nanoelectromechanical resonator for logic operations

Syed N.R. Kazmi, Md A.Al Hafiz, Karumbaiah N. Chappanda, Saad Ilyas, Jorge Holguin, Pedro M.F.J. Costa, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

We report an electro-Thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.

Original language	English (US)
Title of host publication	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	11-15
Number of pages	5
ISBN (Electronic)	9781509030590
DOIs	https://doi.org/10.1109/NEMS.2017.8016963
State	Published - Aug 25 2017
Event	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States Duration: Apr 9 2017 → Apr 12 2017

Publication series

Name	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Conference

Conference	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Country/Territory	United States
City	Los Angeles
Period	04/9/17 → 04/12/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Keywords

Doubly-clamped nanomechanical beam
Electro-Thermal frequency modulation
Logic computation
Logic operations
Nanoelectromechanical resonator
Nanomechanical logic
Resonance frequency

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanical Engineering
Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2017.8016963

Cite this

Kazmi, S. N. R., Hafiz, M. A. A., Chappanda, K. N., Ilyas, S., Holguin, J., Costa, P. M. F. J., & Younis, M. I. (2017). Nanoelectromechanical resonator for logic operations. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (pp. 11-15). Article 8016963 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2017.8016963

Kazmi, Syed N.R. ; Hafiz, Md A.Al ; Chappanda, Karumbaiah N. et al. / Nanoelectromechanical resonator for logic operations. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 11-15 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017).

@inproceedings{776bb5afbaa2463caf901d08d94477b9,

title = "Nanoelectromechanical resonator for logic operations",

abstract = "We report an electro-Thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.",

keywords = "Doubly-clamped nanomechanical beam, Electro-Thermal frequency modulation, Logic computation, Logic operations, Nanoelectromechanical resonator, Nanomechanical logic, Resonance frequency",

author = "Kazmi, {Syed N.R.} and Hafiz, {Md A.Al} and Chappanda, {Karumbaiah N.} and Saad Ilyas and Jorge Holguin and Costa, {Pedro M.F.J.} and Younis, {Mohammad I.}",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 ; Conference date: 09-04-2017 Through 12-04-2017",

year = "2017",

month = aug,

day = "25",

doi = "10.1109/NEMS.2017.8016963",

language = "English (US)",

series = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "11--15",

booktitle = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",

address = "United States",

}

Kazmi, SNR, Hafiz, MAA, Chappanda, KN, Ilyas, S, Holguin, J, Costa, PMFJ & Younis, MI 2017, Nanoelectromechanical resonator for logic operations. in 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017., 8016963, 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Institute of Electrical and Electronics Engineers Inc., pp. 11-15, 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, United States, 04/9/17. https://doi.org/10.1109/NEMS.2017.8016963

Nanoelectromechanical resonator for logic operations. / Kazmi, Syed N.R.; Hafiz, Md A.Al; Chappanda, Karumbaiah N. et al.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 11-15 8016963 (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Nanoelectromechanical resonator for logic operations

AU - Kazmi, Syed N.R.

AU - Hafiz, Md A.Al

AU - Chappanda, Karumbaiah N.

AU - Ilyas, Saad

AU - Holguin, Jorge

AU - Costa, Pedro M.F.J.

AU - Younis, Mohammad I.

PY - 2017/8/25

Y1 - 2017/8/25

N2 - We report an electro-Thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.

AB - We report an electro-Thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.

KW - Doubly-clamped nanomechanical beam

KW - Electro-Thermal frequency modulation

KW - Logic computation

KW - Logic operations

KW - Nanoelectromechanical resonator

KW - Nanomechanical logic

KW - Resonance frequency

UR - http://www.scopus.com/inward/record.url?scp=85030831929&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2017.8016963

DO - 10.1109/NEMS.2017.8016963

M3 - Conference contribution

AN - SCOPUS:85030831929

T3 - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

SP - 11

EP - 15

BT - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Y2 - 9 April 2017 through 12 April 2017

ER -

Kazmi SNR, Hafiz MAA, Chappanda KN, Ilyas S, Holguin J, Costa PMFJ et al. Nanoelectromechanical resonator for logic operations. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 11-15. 8016963. (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017). doi: 10.1109/NEMS.2017.8016963

Nanoelectromechanical resonator for logic operations

Abstract

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Bibliographical note

Keywords

ASJC Scopus subject areas

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