TY - GEN
T1 - Multiwavelength optical scatterometry of dielectric gratings
AU - Yashina, Nataliya P.
AU - Melezhik, Petr N.
AU - Sirenko, Kostyantyn
AU - Granet, Gerard
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2012/8
Y1 - 2012/8
N2 - Modern scatterometry problems arising in the lithography production of periodic gratings are in the focus of the work. The performance capabilities of a novel theoretical and numerical modeling oriented to these problems are considered. The approach is based on rigorous solutions of 2-D initial boundary value problems of the gratings theory. The quintessence and advantage of the method is the possibility to perform an efficient analysis simultaneously and interactively both for steady state and transient processes of the resonant scattering of electromagnetic waves by the infinite and compact periodic structures. © 2012 IEEE.
AB - Modern scatterometry problems arising in the lithography production of periodic gratings are in the focus of the work. The performance capabilities of a novel theoretical and numerical modeling oriented to these problems are considered. The approach is based on rigorous solutions of 2-D initial boundary value problems of the gratings theory. The quintessence and advantage of the method is the possibility to perform an efficient analysis simultaneously and interactively both for steady state and transient processes of the resonant scattering of electromagnetic waves by the infinite and compact periodic structures. © 2012 IEEE.
UR - http://hdl.handle.net/10754/594171
UR - http://ieeexplore.ieee.org/document/6331241/
UR - http://www.scopus.com/inward/record.url?scp=84870845783&partnerID=8YFLogxK
U2 - 10.1109/mmet.2012.6331241
DO - 10.1109/mmet.2012.6331241
M3 - Conference contribution
SN - 9781467344791
SP - 409
EP - 414
BT - 2012 International Conference on Mathematical Methods in Electromagnetic Theory
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -